Ultra Pure Water Management in Semiconductor Manufacturing
Discover expert insights on ultra pure water reuse and quality control in semiconductor fabs. In this interview, AZoMaterials speaks with METTLER TOLEDO about the critical role of ultra-pure water management in semiconductor fabs.
Ultra-pure water (UPW), also known as deionized (DI) water, is essential to nearly every process in a semiconductor fab, from etching and cleaning to chemical mechanical planarization (CMP). The semiconductor industry is the world’s largest consumer of UPW.
- Pretreatment of raw water
- Polishing to UPW-grade quality
- Distribution to the process tools
- Assessment for either reuse or discharge
Reducing water consumption is a major environmental focus, guided by industry efforts like the FO-98 committee.
Author's summary: Experts discuss ultra pure water management.